FA Business

Solar Cell 용 ALD TOOL

iOV M5000 ALD  System for Large Glass Deposition
Atomic Layer Deposition, 원자층 증착기
HVM ALD System for LARGE SIZE rigid panel (ex. CIGS PV)
Buffer layer deposition
High-throughput (>100 panels / System *hr) :
1 System has 8 chamber
1 chamber has 10 panel loading.(but variable up to 15 panels per requirement)